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AFM-XYZ-calibration-standard
AFM / SPM Atomic Force Microscope Scanning Probe Microscope Calibration Standards and Test Gratings
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AFM / SPM Calibration Standards and Test Gratings

 

AFM / SPM XYZ calibration standards

 

Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and X-Y-axis  calibration:

  • The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X–Y calibration for larger scanners in the 40-100µm range.
  • The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.
  • The CS and HS series AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.

CS-20NG AFM calibration standard

AFM /SPM XYZ calibration standards specifications table

 

Calibration Standard

HS-20MG

HS-100MG

HS-500MG

CS-20NG
Product # 34-030020 / 34-030021 34-030100 / 34-030101 34-030500 / 34-030501 34-032020 / 34-032021
Height (Z) 20nm 100nm 500nm 20nm
Height (Z) accuracy 2% 3% 3% 2%
X-Pitch 10µm, 5µm 10µm, 5µm 10µm, 5µm 10µm, 5µm, 500nm
Y-Pitch 10µm, 5µm 10µm, 5µm 10µm, 5µm 10µm, 5µm, 500nm
Pitch accuracy 0.1µm, 0.1µm 0.1µm, 0.1µm 0.1µm, 0.1µm 0.1µm, 0.1µm, 10nm
10µm pitch structure
5µm pitch structure

500nm pitch

 Square holes / pillars
Round holes, pillars & lines
-		 Square holes / pillars
Round holes, pillars & lines
-		 Square holes / pillars
Round holes, pillars & lines
-		 Square holes / pillars
Round holes, pillars & lines
Round holes
10µm pitch area
5µm pitch area
500nm pitch area		 1x1mm
500x500µm
-		 1x1mm
500x500µm
-		 1x1mm
500x500µm
-		 1x1mm
500x500µm
100x100µm
Die size 5x5mm 5x5mm 5x5mm 5x5mm
Construction SiO2 on Si SiO2 on Si SiO2 on Si SiO2 on Si
Mounting option 12mm AFM disc 12mm AFM disc 12mm AFM disc 12mm AFM disc

 

TG series AFM / SPM calibration and test gratings

The TGX and TGF11 test gratings are particularly useful for lateral calibration and to assess scanner non-linearity both in lateral and vertical directions.  Other parameters to determine are: hysteresis, creep and cross coupling effects.  Etched into silicon along the (111) crystallographic planes. Typical radius of the edges is les than 5nm.

 

Specifications for the TG series AFM / SPM calibration and test gratings

TGX AFM / SPM calibration grating, 3um pitch, undercut edges
Test Grating

TGX

TGF11
Product # 34-033010-U / 34-033010 34-033030-U / 34-033030
Calibrated pitch value 3 µm 10 µm
Pitch accuracy 0.1 µm 0.1 µm
Edge radii 5nm 5nm
Angle 54.74° 54.74°
Step height, approx. 1 µm 1.75 µm
Active area 1 x 1 mm 3 x 3 mm
Construction Etched silicon Etched silicon
Chip dimensions 5 x 5 x 0.3mm 5 x 5 x 0.3mm
Mounting option On 12mm AFM disc On 12mm AFM disc

 

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