AFM / SPM Calibration Standards and Test Gratings
AFM / SPM XYZ calibration standards
Atomic Force Microscopy (AFM) has become a valuable tool for imaging and accurate measurements on the micrometer and nanometer scale. In order to validate the measuring capabilities, the AFM system need to be correctly calibrated. On this page you will find a selection of affordable and accurate AFM calibration standards for Z-axis and X-Y-axis calibration:
- The HS series with 20nm, 100nm and 500nm calibrated Z height also offer X–Y calibration for larger scanners in the 40-100µm range.
- The CS calibration standard with 20nm Z height also enables X- Y-axis calibration at a smaller scanner size in the µm range.
- The CS and HS series AFM calibration standard structures are all fabricated on a Si chip which is mounted on a 12mm stainless steel AFM disc with electrically conductive epoxy resin.
AFM /SPM XYZ calibration standards specifications table
Calibration Standard |
HS-20MG |
HS-100MG |
HS-500MG |
CS-20NG |
Product # | 34-030020 / 34-030021 | 34-030100 / 34-030101 | 34-030500 / 34-030501 | 34-032020 / 34-032021 |
Height (Z) | 20nm | 100nm | 500nm | 20nm |
Height (Z) accuracy | 2% | 3% | 3% | 2% |
X-Pitch | 10µm, 5µm | 10µm, 5µm | 10µm, 5µm | 10µm, 5µm, 500nm |
Y-Pitch | 10µm, 5µm | 10µm, 5µm | 10µm, 5µm | 10µm, 5µm, 500nm |
Pitch accuracy | 0.1µm, 0.1µm | 0.1µm, 0.1µm | 0.1µm, 0.1µm | 0.1µm, 0.1µm, 10nm |
10µm pitch structure 5µm pitch structure 500nm pitch |
Square holes / pillars Round holes, pillars & lines - |
Square holes / pillars Round holes, pillars & lines - |
Square holes / pillars Round holes, pillars & lines - |
Square holes / pillars Round holes, pillars & lines Round holes |
10µm pitch area 5µm pitch area 500nm pitch area |
1x1mm 500x500µm - |
1x1mm 500x500µm - |
1x1mm 500x500µm - |
1x1mm 500x500µm 100x100µm |
Die size | 5x5mm | 5x5mm | 5x5mm | 5x5mm |
Construction | SiO2 on Si | SiO2 on Si | SiO2 on Si | SiO2 on Si |
Mounting option | 12mm AFM disc | 12mm AFM disc | 12mm AFM disc | 12mm AFM disc |
TG series AFM / SPM calibration and test gratings
The TGX and TGF11 test gratings are particularly useful for lateral calibration and to assess scanner non-linearity both in lateral and vertical directions. Other parameters to determine are: hysteresis, creep and cross coupling effects. Etched into silicon along the (111) crystallographic planes. Typical radius of the edges is les than 5nm.
Specifications for the TG series AFM / SPM calibration and test gratings
Test Grating |
TGX |
TGF11 |
Product # | 34-033010-U / 34-033010 | 34-033030-U / 34-033030 |
Calibrated pitch value | 3 µm | 10 µm |
Pitch accuracy | 0.1 µm | 0.1 µm |
Edge radii | 5nm | 5nm |
Angle | 54.74° | 54.74° |
Step height, approx. | 1 µm | 1.75 µm |
Active area | 1 x 1 mm | 3 x 3 mm |
Construction | Etched silicon | Etched silicon |
Chip dimensions | 5 x 5 x 0.3mm | 5 x 5 x 0.3mm |
Mounting option | On 12mm AFM disc | On 12mm AFM disc |