Product Description:
EMCrafts CUBE II Series:
Scanning Electron Microscope with World-Class Performance
- Automatic stage & 4CH BSE as a basic option
- Light weight & High productivity
- Integrated EDS System (Option)
- DIY installation
Advantages
- Simple and Intuitive User Interface for Everyone
- 65kg portable Tabletop SEM
- 5-Axis Stage System
- Maximum Sample Size – Horizontal : 140mm, Vertical : 80mm
- X 10 ~ X 200,000 Magnification
- Automatic Functions To Minimize Repetitive Tasks – Auto Focus, Auto Brightness & Contrast, Auto Gun Alignment, Auto Saturation
- High Resolution Imaging – 5.0nm (SE Image) / 6.0nm (BSE Image)
- Rapid analysis by exchanging specimen within 90 sec – Vacuum ready within 90 sec – Ventilation ready within 10 sec
- 4CH BSED as a basic option(Combo, Topo)
- Various kinds of specimens can be analyzable with optional detectors – EDS(All-in-one Model of SEM-EDS) *Oxford, Bruker, EDAX, Thermo compatible, Auto Rotation, Auto Tilt, Chamber Camera, Navigation
Specifications:
Stage | 5-axis Stage -X : 42mm (Motorized) -Y : 42mm (Motorized) -Z : 5 ~ 53mm (Motorized) -T : -90° ~ 90° (Manual) -R : 360° (Beam Rotation) |
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Vacuum Mode | High Vacuum Mode (<9×10-3 Pa) Charge Reduction Mode |
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Vacuum System | -Fully Automated Evacuation System -Turbo molecular pump (Vacuum ready within 90 sec) -Rotary vane pump -Electrical valve system |
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Electron Gun | Pre-centered Tungsten Filament | ||
Detector | SE Detector 4CH BSE Detector | ||
Resolution | 5.0nm (SE Image at 30kV) | ||
Magnification | x10 ~ x200,000 | ||
Acceleration Voltage | 1kV ~ 30kV | ||
Image Shift | 100μm | ||
Maximum Sample Size | Horizontal : 140mm; Vertical : 80mm | ||
Working Distance | 5 ~ 53mm | ||
Sample loading Time | 90 sec (Vacuum) 10 sec (Vent) | ||
Automatic Function | Auto Brightness & Contrast, Auto Focus, Auto Gun Alignment, Auto Saturation, Auto Filament, Bias | ||
Image Format | JPG, TIFF, BMP, PNG | ||
Display Mode | Focus Mode : 320 x 240 pixel, Resizable Preview Mode : 800 x 600 Slow Mode : Applicable to both preview and focus mode Photo Mode : Up to 3200 x 2400 |
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Dimension(mm) | W x D x H = 410mm x 440mm x 520mm, 65kg | ||
Operation Device(PC) | Windows 10-based All-in-One 21.5” Workstation, 100% controlled by keyboard and mouse | ||
Optional Devices | EDS (All-in-one Model of SEM-EDS), Auto Rotation, Auto Tilt, Chamber Camera, Navigation *Oxford, Bruker, EDAX, Thermo compatible |
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Power Supply | Single Phase : 100 ~ 240VAC, 50 / 60Hz, 1kVA |